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Press Release Source: Vistec On Thursday June 16, 2011, 10:00 am EDT

SAN DIEGO, Calif. & WATERVLIET, N.Y.–(BUSINESS WIRE)– Vistec Lithography, inc., a leading supplier of Electron Beam Lithography systems, has received an order for one of its EBPG5200 systems from the University of California, San Diego. the Vistec EBPG5200 will be installed in the Nano3 cleanroom facility at the California Institute for Telecommunications and Information Technology (Calit2) and will be used for nano- and microfabrication enabling basic and applied research and development for hundreds of academic and industrial users.

the extension of the facility was enabled by funding from the Major Research Instrumentation (MRI-R2) program of the National Science Foundation (NSF) and with contributions from UC San Diego, its Jacobs School of Engineering, Department of Electrical and Computer Engineering, the UC San Diego School of Medicine, and Calit2/Nano3.

the Nano3 facility provides a synergistic environment for fundamental research and development efforts at the nanoscale with a focus on Nanoscience, Nanoengineering and Nanomedicine. in addition to providing essential nanofabrication capabilities for research on electronic and photonic materials and devices, Nano3 facilitates the pursuit of research in emerging, interdisciplinary and rapidly growing fields such as biomedical and biochemical devices, monolithic and heterogeneous integrated electronic and photonic devices and circuits, and sensor technology.

“We are looking forward to working with a high-performance instrument such as Vistec’s EBPG5200 system,” said UC San Diego electrical and computer engineering Professor Shaya Fainman, principal investigator on the NSF MRI-R2 proposal. “It will enable us to make major advances in nanoscale science and technology research and it will also fundamentally strengthen the research environment of the university as a whole in these emerging fields.”

While the initial utilization will primarily be in the research areas of nanophotonics for intra-chip communication, nanomagnetics for data storage, and tissue engineering for biomedical applications, numerous other ongoing projects will also benefit from the acquisition. these include radio frequency micro- and nanoelectro-mechanical systems; the study of novel photonic phenomena at the interface between the classical and quantum regimes of thermo-electric materials and nanoscale electronic devices; development of tools for 1x nanometer-resolution metrology; synthesis of negative index metamaterials; and metamaterials for biomedical sensing and energy harvesting.

“Referring back to a field-proven evolution, the Vistec EBPG5200 is the perfect match to these demands,” explained Rainer Schmid, General Manager at Vistec Lithography, inc. the EBPG5200 system is equipped with a 50MHz pattern generator and full 20bit address technology. as a special characteristic, the system is able to operate with 20, 50 and 100kV accelerating voltage. “Thanks to its high resolution and beam stability, our system is set to routinely generate structures less than 8nm on varying substrates sizes enabling full patterning across a 200mm diameter,” added Schmid. “Furthermore, the system can be used by ‘multi user environments’ due to its interactive graphical user interface.”

After having installed a large number of electron-beam lithography systems across the United States, the order from UC San Diego is another major step in Vistec’s long-term strategy. said Schmid: “We are aiming to become first choice for Universities and Research Institutions across the US, when it comes to nano research equipment. We are very pleased to have received an order from a university of such a high reputation.”

Media Information:

About Vistec Electron Beam Lithography Group

the Vistec Electron Beam Lithography Group is a global manufacturer and supplier of electron-beam lithography systems with applications ranging from nano and bio-technology to photonics and industrial environments like mask making or direct writing for fast prototype development and design evaluation. the Vistec Electron Beam Lithography Group combines Vistec Lithography and Vistec Electron Beam.

About Vistec Lithography

Vistec Lithography develops, manufactures, and sells electron-beam lithography equipment based on Gaussian Beam technology. their electron-beam systems are world-wide accepted in advanced research laboratories and universities.

About Vistec Electron Beam

Vistec Electron Beam is providing electron-beam lithography equipment based on Shaped Beam technology, which is used by leading semiconductor manufacturers and many research institutes around the world. their innovative electron-beam systems are used for microchip production and integrated optics as well as for scientific and commercial research.

About the University of California, San Diego

Founded in 1960, the University of California, San Diego is one of the nation’s most accomplished research universities, widely acknowledged for its local impact, national influence and global reach. the campus is ideally located near the Pacific Ocean, the U.S.-Mexico border and the Pacific Rim. UC San Diego is renowned for its collaborative, diverse and cross-disciplinary ethos that transcends traditional boundaries in science, the arts and the humanities. the university’s award-winning scholars are experts at the forefront of their fields with an impressive track record for achieving scientific, medical and technological breakthroughs. A leader in climate science research, UC San Diego is also one of the greenest universities in the nation and promotes sustainability solutions throughout the region and the world.

About Calit2 at UC San Diego

the UC San Diego Division of the California Institute for Telecommunications and Information Technology (Calit2), together with Calit2’s division at UC Irvine, house over 1,000 researchers across the two campuses, organized around more than 50 projects on the future of telecommunications and information technology and how these technologies will transform a range of applications important to the California economy and its citizens’ quality of life. Calit2 celebrated its 10th anniversary in December 2010.

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